ＤＬＣ膜的脱膜方法

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ＤＬＣ膜的脱膜方法

本发明属于加速器物理技术领域，公开了一种ＤＬＣ膜的脱膜方法。该方法是在覆盖有脱膜剂的基片上沉积ＤＬＣ膜，然后将ＤＬＣ膜脱下，关键在于，在基片上沉积ＤＬＣ膜之前，先沉积保护膜。该方法可简单、高效的得到自支撑ＤＬＣ膜。

Stripping method of DLC film

The invention belongs to the technical field ofaccelerator physics, and discloses a stripping method of a DLC film. The methodcomprises: depositing a DLC film on a substrate covered with a stripper andthen stripping the DLC film, the key being that a protective film is depositedbefore depositing the DLC film on the substrate. The method can obtain a self-supportingDLC film simply and efficiently.