一种自动聚焦激光微位移测量仪及测量方法

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一种自动聚焦激光微位移测量仪及测量方法

本发明公开了一种自动聚焦激光微位移测量仪及测量方法，要解决的技术问题是解决采用目前非接触式测量仪器及方法测量精度不高，测量范围小等缺点。技术方案是测量仪可工作在开环状态和闭环状态，由激光读取头、聚焦误差信号产生单元、聚焦伺服控制单元、音圈电机驱动器、精密微动平台和系统显示单元组成，聚焦伺服控制单元由A/D采样模块、控制模块和D/A输出模块组成，控制模块采用了DSP和FPGA，DSP中设计有开环搜索聚焦程序和聚焦搜索控制程序。采用本发明所述测量仪对被测物体表面形貌进行测量的方法有开环搜索聚焦法和闭环伺服控制法。本发明采用了DSP+FPGA控制的技术方案，大大提高了聚焦精度和聚焦速度，且测量仪体积小巧，操作简单。

Auto-focusinglaser micro-displacement measuring instrument and method

Theinvention discloses an auto-focusing laser micro-displacement measuringinstrument and method. The technical problems of low measuring precision, smallmeasuring range and the like by adopting a current non-contact-type measuringinstrument and method are solved. According to the technical scheme, the measuringinstrument can work in an open loop state and a closed loop state and iscomposed of a laser reading head, a focusing error signal generating unit, a focusingservo control unit, a voice coil motor driver, a precision micro-motionplatform and a system display unit, the focusing servo control unit is composedof an A/D sampling module, a control module and a D/A output module, thecontrol module adopts a DSP and an FPGA, and an open loop search focusing programand a focusing search control program are designed in the DSP. The methods for measuringthe surface appearance of a measured object by adopting the auto-focusing lasermicro-displacement measuring instrument comprise the open loop search focusingmethod and the closed loop servo control method. The auto-focusing lasermicro-displacement measuring instrument and method adopt the technical schemeof DSP and FPGA control, the focusing precision is greatly improved, thefocusing speed is greatly increased, and the measuring instrument is small insize and easy to operate.